A unique, flexible, & inexpensive Injector provides:

  • Separation of chemical feed streams
  • Adjustability of chemical concentration profile
  • Easy removal & replacement with alternate version

A proprietary top loading, glove box contained reactor design provides:

  • Gas & Chemical efficiencies
  • Effective gas distribution over entire surface area
  • Temperature uniformity via adjustable fluid filled gap
  • Process flexibility
Flange Contained Injector

Flange Contained Injector

CVD Reactor, Glove Box Contained

CVD Reactor, Glove Box Contained